PECVD graphite wafer tary
- Company Name:Semi Materials Co., Ltd.
- Membership:Free Member
- Member Since:2003. 12.06
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Mike. Jung
- Related Keywords:wafer tray
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Semi Materials Co., Ltd.
[Korea]
High strength
and high purity together with dense material structure and minimum erosion by
plasma are requirements for long life with wafer carriers.
We have developed garphites which meet these requirements.
All the common types of carriers are available with a high level of surface
finish and flatness or with a defined surface roughness.
If required, wafer-carriers can be coated with PyC or SiC.
Grade recommendation
R6340P, R6500P, R6340X4
Physical properties of purity graphite (averages)
Physical
Property
|
R6340
|
R6650
|
Density
(g/cm3)
|
1.73
|
1.85
|
Porosity
(%)
|
15
|
10
|
Hardness
Rockwell B (HR)
|
80
10/100 |
90
5/100 |
E-Modulus(N/mm2)
|
11000
|
13500
|
Flexural
Strength (N/mm2)
|
45
|
65
|
Compressive
Strength (N/mm2)
|
90
|
150
|
Specific
Electrical Resistance(mWm)
|
14
|
14
|
Thermal
Expansion
(20~1000°C ; x10-6K-1) |
4.0
|
5.0
|
Thermal
Comductivity (W/mK)
|
90
|
90
|
Pressing
Method
|
Isostatic
Molded
|
Element
Concentration
|
|||||||||||||||||||
-
|
code
|
Ash
Value |
Al
|
B
|
Ca
|
Co
|
Cr
|
Cu
|
Fe
|
K
|
Mg
|
Mn
|
Na
|
Ni
|
P
|
S
|
Si
|
Ti
|
V
|
High
purity
|
P
|
20ppm
|
<0.1
|
1
|
1
|
<0.1
|
<0.1
|
0.2
|
0.5
|
<1
|
0.15
|
<0.1
|
<1
|
<0.1
|
<0.3
|
<2
|
<2
|
0.5
|
0.2
|
Super
pure |
S
|
5ppm
|
<0.1
|
0.05
|
0.3
|
<0.1
|
<0.1
|
0.1
|
0.3
|
<1
|
0.05
|
<0.1
|
<1
|
<0.1
|
<0.3
|
<2
|
0.5
|
0.3
|
0.1
|
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