Semi Materials Co., Ltd.

PECVD graphite wafer tary

See Larger Picture : PECVD graphite wafer tary

  • Company Name:Semi Materials Co., Ltd.
  • Membership:Free Member
  • Registration Date:2003. 12.06
  • Country/Region:Korea 
  • City:Gyeonggi-do
  • Contact:Mike. Jung  
  • Related Keywords:wafer tray
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Semi Materials Co., Ltd.
[Korea]

Address
Lojit venture bldg 4F, 22-2 Sunae-Dong, Bundang-Gu,  Sungnam-City Gyeonggi-do
Phone
82-31-7118978
Contact name
Mike. Jung

Description

High strength and high purity together with dense material structure and minimum erosion by plasma are requirements for long life with wafer carriers.

We have developed garphites which meet these requirements.

All the common types of carriers are available with a high level of surface finish and flatness or with a defined surface roughness.

If required, wafer-carriers can be coated with PyC or SiC.

Grade recommendation
R6340P, R6500P, R6340X4

Physical properties of purity graphite (averages)

Physical Property
R6340
R6650
Density (g/cm3)
1.73
1.85
Porosity (%)
15
10
Hardness Rockwell B (HR)
80
10/100
90
5/100
E-Modulus(N/mm2)
11000
13500
Flexural Strength (N/mm2)
45
65
Compressive Strength (N/mm2)
90
150
Specific Electrical Resistance(mWm)
14
14
Thermal Expansion
(20~1000°C ; x10-6K-1)
4.0
5.0
Thermal Comductivity (W/mK)
90
90
Pressing Method
Isostatic Molded
WG : with grain.
AG : against grain.
If not stated otherwise, all values are measured with a test piece the axis of which is cut with grain.

Typical analysis
Element Concentration
-
code
Ash
Value
Al
B
Ca
Co
Cr
Cu
Fe
K
Mg
Mn
Na
Ni
P
S
Si
Ti
V
High purity
P
20ppm
<0.1
1
1
<0.1
<0.1
0.2
0.5
<1
0.15
<0.1
<1
<0.1
<0.3
<2
<2
0.5
0.2
Super
pure
S
5ppm
<0.1
0.05
0.3
<0.1
<0.1
0.1
0.3
<1
0.05
<0.1
<1
<0.1
<0.3
<2
0.5
0.3
0.1


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